C60 molecular depth profiling of a model polymer

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C60 molecular depth profiling of a model polymer

The bombardment of a 26 nm poly(methyl methacrylate) (PMMA) film has been studied as a model for depth profiling of polymeric samples using a newly developed C60 þ ion source. Experiments were conducted on a ToF-SIMS instrument equipped with C60 þand Gaþ ion sources. A focused dc C60 þ ion beam was used to etch through the polymer sample at specified time intervals. Subsequent spectra were reco...

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ژورنال

عنوان ژورنال: Applied Surface Science

سال: 2004

ISSN: 0169-4332

DOI: 10.1016/j.apsusc.2004.03.113